Study on the performance enhancement mechanism of the mosfet device based on Si/SiGe strained silicon / Hashimah Hashim and Ahmad Sabirin Zoolfakar

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Study on the performance enhancement mechanism of the mosfet device based on Si/SiGe strained silicon / Hashimah Hashim and Ahmad Sabirin Zoolfakar

This research is carried out to deposit and characterizes nanostructured Zinc Oxide (ZnO) thin film by radio frequency (RF) magnetron sputtering method for ammonia (NH3 ) gas sensor application. The sensitivity of sensor is mainly depends on the surface reaction effect which strongly depends on the...

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Bibliographic Details
Main Authors:	Hashim, Hashimah, Zoolfakar, Ahmad Sabirin
Format:	Research Reports
Language:	English
Published:	2007
Subjects:	Nanostructures Physical and theoretical chemistry Apparatus and materials
Online Access:	https://ir.uitm.edu.my/id/eprint/20366/

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