A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao

A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao

The production of Integrated Circuits (IC) is a detailed and exacting process requiring tight specifications and precise equipment. The high cost and unique traits of this equipment requires high utilization and maximum throughput to achieve real profits. The design of fabrication facility (FAB) pro...

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Bibliographic Details
Main Authors: Terry, Adam, Ramulu, Mamidala, Nageswara Rao, Posinasetti
Format: Article
Language:English
Published: Faculty of Mechanical Engineering and University Publication Centre (UPENA) 2009
Online Access:https://ir.uitm.edu.my/id/eprint/17619/

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