Fabrication and characterization of 0.24 Micron CMOS device by using simulation / Nazirah Mohamat Kasim, Rosfariza Radzali and Ahmad Puad Ismail

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Fabrication and characterization of 0.24 Micron CMOS device by using simulation / Nazirah Mohamat Kasim, Rosfariza Radzali and Ahmad Puad Ismail

Simulation and analyzing the electrical characteristics of 0.24 micron CMOS device was done by using Silvaco TCAD. Electrical characteristics were carried out by using Atlas device simulator, while for simulation the process was carried out by using Athena process simulator to modify theoretical val...

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Bibliographic Details
Main Authors:	Mohamat Kasim, Nazirah, Radzali, Rosfariza, Ismail, Ahmad Puad
Format:	Article
Language:	English
Published:	Universiti Teknologi MARA, Pulau Pinang & Pusat Penerbitan Universiti (UPENA) 2010
Online Access:	https://ir.uitm.edu.my/id/eprint/16338/

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