Pemilihan bahan kapsul kukuh bagi peranti MEMS di bawah tekanan tinggi / Yusnira Husaini, Ahmad Sabirin Zoolfakar and Mas Izyani Md. Ali

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Pemilihan bahan kapsul kukuh bagi peranti MEMS di bawah tekanan tinggi / Yusnira Husaini, Ahmad Sabirin Zoolfakar and Mas Izyani Md. Ali

Kajian mengenai biasan pennukaan beberapa jenis bahan kapsul di bawah tekanan tegak sekata telah dijalankan bagi mendapat bahan terbaik bagi peranti MEMS. Kapsul diperlukan bagi melindungi bahagian yang boleh bergerak di dalam peranti MEMS sewaktu proses pembingkaian bertekanan tinggi dijalankan. Ba...

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Bibliographic Details
Main Authors:	Husaini, Yusnira, Zoolfakar, Ahmad Sabirin, Md. Ali, Mas Izyani
Format:	Research Reports
Language:	English
Published:	Institute of Research, Development and Commercialization (IRDC) 2009
Subjects:	Polymers. Macromolecules Microelectromechanical systems
Online Access:	https://ir.uitm.edu.my/id/eprint/12654/

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