Chemical Amplification of a Triphenylene Molecular Electron Beam Resist

QR Code

Chemical Amplification of a Triphenylene Molecular Electron Beam Resist

Molecular resists, such as triphenylene derivatives, are small carbon rich molecules, and thus give the potential for higher lithographic resolution and etch durability, and lower line width roughness than traditional polymeric compounds. Their main limitation to date has been poor sensitivity. A...

Full description

Bibliographic Details
Main Author:	Mohd Zaid, Hasnah
Format:	Article
Language:	English
Published:	2007
Subjects:	QC Physics
Online Access:	http://scholars.utp.edu.my/id/eprint/502/ http://scholars.utp.edu.my/id/eprint/502/2/Triphenylene.pdf

Similar Items

Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
by: Mohd Zaid, Hasnah
Published: (2008)

Chemically amplified molecular resists for electron beam lithography
by: Robinson, A.P.G, et al.
Published: (2006)

A Chemically Amplified Fullerene-Derivative Molecular Electron-Beam Resist
by: Gibbons, Francis, et al.
Published: (2007)

Electron beam measurements of a transient hollow cathode device / Khoo Swee Khean
by: Khoo, Swee Khean
Published: (1999)

Autosoliton in Ablowitz-Ladik chain with linear damping and nonlinear amplification
by: Abdullaev, Fatkhulla Kh., et al.
Published: (2002)

Effect of electron beam irradiation on thermal and crystallization behaviour of PP/EPDM blend
by: Balaji, Anand B., et al.
Published: (2017)

Effect of electron beam irradiation on thermal and crystallization behavior of PP/EPDM blend
by: Balaji, Anand B., et al.
Published: (2017)

Study of III-nitrides heterostructures grown by plasma-assisted molecular beam epitaxy (PAMBE)
by: Chin, Che Woei
Published: (2009)

Growth of Gallium Nitride (GaN) on Aluminium Nitride Surfaces Grown by Electron-Beam Evaporator
by: Fikri, Z. M., et al.
Published: (2015)

Laboratory spectroscopy and astronomical significance of the fully-benzenoid PAH triphenylene and its cation
by: Kofman, V., et al.
Published: (2017)

The Growth Of Highly Doped p-GaN On Sapphire By RF Plasma-Assisted Molecular Beam Epitaxy.
by: C, W Chin, et al.
Published: (2007)

Potential of polycrystalline GaN deposited by electron beam evaporator for metal-semiconductor-metal {MSM) photodetector device
by: Ariff, A., et al.
Published: (2017)

Quality of the beam produced a pulsed ND: YAG laser
by: Tamuri, A. R., et al.
Published: (2008)

Fabrication of Porous GaN using Bottom-Up Approached through Electron Beam Evaporator for High Efficient Devices
by: Samsudin, M. E. A., et al.
Published: (2015)

Role of NH3 Annealing Treatment in Improving SeN Layer on GaAs Substrate Using Electron Beam Evaporator
by: Alvin, Y. S. M., et al.
Published: (2015)

Plasma-beam Alignment Technique for Ferroelectric Liquid Crystals
by: Hegde, Gurumurthy, et al.
Published: (2008)

Laser beam modulation by an acousto optic mode locker
by: Mat Daud, Nazariah, et al.
Published: (2006)

Properties of ion beams generated by nitrogen plasma focus
by: Akel, M., et al.
Published: (2014)

Optimization of Post-Annealing NH3 Temperature for GaN Growth on GaAs (100) Substrate via Electron Beam Evaporator
by: Taib, M. lkram Md, et al.
Published: (2015)

Optimization of Post-Annealing Treatment Conditions on GaN Layer Grown on m-Plane Sapphire Substrate by Electron Beam Evaporator
by: Ariff, A., et al.
Published: (2015)

Characterization of oxygen ion beams emitted from plasma focus
by: Akel, M., et al.
Published: (2014)

Plasma focus ion beam fluence and flux - For various gases
by: Lee, S., et al.
Published: (2013)

Optical Characterization Of GaN Thin Film Grown On Si(111) By Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy.
by: L, S Chuah, et al.
Published: (2007)

Chemical and heat resistance of silicone-acrylic-based binder and paint system on mild steel panels
by: Chew, K.W., et al.
Published: (2007)

Correlation between Electronic Structure and Electron Conductivity in MoX2 X = S, Se, Te)
by: Saifful Kamaluddin, Muzakir
Published: (2016)

Plasma focus ion beam fluence and flux-Scaling with stored energy
by: Lee, S., et al.
Published: (2012)

Enhancement of the ion beam emission in a low energy plasma focus / Lim Lian Kuang
by: Lim, Lian Kuang
Published: (2012)

Modeling and simulation of single-electron transistors
by: Lee, Jia Yen, et al.
Published: (2005)

P-156: Alignment of Ferroelectric Liquid Crystals with the Substrates Processed by Plasma-Beam
by: Hegde, Gurumurthy, et al.
Published: (2008)

Application of ZnO Nanoparticles EM Wave Detector Prepared by Solgel and Self-Combustion Techniques
by: Yahya, Noorhana, et al.
Published: (2010)

Application of ZnO Nanoparticles EM Wave Detector Prepared by Solgel and Self-Combustion Techniques
by: Yahya, Noorhana, et al.
Published: (2010)

Ion beam features produced by two plasma focus machines operated with different gases
by: Akel, M., et al.
Published: (2014)

Electronic structure simulation of gallium arsenide clusters
by: Musa, Nor Muniroh
Published: (2009)

FOUNDATION PHYSICS
by: Mohamed, Norani Muti, et al.
Published: (2006)

The effect of driving frequency variation on the output beam deflection angle of acousto optic modulator (aom)
by: Ismail, Norshahidah, et al.
Published: (2006)

Investigation of AISI Steel Vickers Hardness and Nitrogen Ion Beam Energy of a 3 kJ Plasma Focus
by: Arwinder, Singh, et al.
Published: (2019)

Optimum length for pin fins used in electronic cooling
by: Mafeed, M. P., et al.
Published: (2012)

Plasma Platform to Investigate Error Structure in the Electronic Components
by: M.V., Roshan, et al.
Published: (2019)

Optimization of Nanowire Resistance Load Logic Inverter
by: Naif, Yasir Hashim, et al.
Published: (2015)

Resistivity measurement of ZnO:AI films for solar cell
by: Tan, Hang Khume, et al.
Published: (2006)