Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever

The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...

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Bibliographic Details
Main Authors: Dennis , John Ojur, Talha , W.A., Hamid , N.H.B.
Format: Conference or Workshop Item
Language:English
Published: 2009
Subjects:
Online Access:http://scholars.utp.edu.my/id/eprint/310/
http://scholars.utp.edu.my/id/eprint/310/1/paper.pdf

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