Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://scholars.utp.edu.my/id/eprint/310/ http://scholars.utp.edu.my/id/eprint/310/1/paper.pdf |