Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://scholars.utp.edu.my/id/eprint/310/ http://scholars.utp.edu.my/id/eprint/310/1/paper.pdf |
| _version_ | 1848658956289835008 |
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| author | Dennis , John Ojur Talha , W.A. Hamid , N.H.B. |
| author_facet | Dennis , John Ojur Talha , W.A. Hamid , N.H.B. |
| author_sort | Dennis , John Ojur |
| building | UTP Institutional Repository |
| collection | Online Access |
| description | The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication technology and bulk micromachining in CoventorWare simulation environment. Analytical models describing 3-D cantilever vibration modes that are actuated by the Lorentz force and their verification by simulation is discussed. Results show that the resonant frequencies for mode 1 and 2 increase with increasing thickness of the cantilever while it is independent of the thickness for mode 3. On the other hand the resonant frequency for mode 3 increases with increasing width of the cantilever while it is independent of width for mode 1 and 2. It is also observed that the displacement of the cantilever for identical applied Lorentz force is highest, indicated highest sensitivity, for mode 1 and lowest for mode 3. ©EDA Publishing/DTIP 2009.
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| first_indexed | 2025-11-13T07:22:46Z |
| format | Conference or Workshop Item |
| id | oai:scholars.utp.edu.my:310 |
| institution | Universiti Teknologi Petronas |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-13T07:22:46Z |
| publishDate | 2009 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | oai:scholars.utp.edu.my:3102017-01-19T08:25:38Z http://scholars.utp.edu.my/id/eprint/310/ Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever Dennis , John Ojur Talha , W.A. Hamid , N.H.B. TK Electrical engineering. Electronics Nuclear engineering The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication technology and bulk micromachining in CoventorWare simulation environment. Analytical models describing 3-D cantilever vibration modes that are actuated by the Lorentz force and their verification by simulation is discussed. Results show that the resonant frequencies for mode 1 and 2 increase with increasing thickness of the cantilever while it is independent of the thickness for mode 3. On the other hand the resonant frequency for mode 3 increases with increasing width of the cantilever while it is independent of width for mode 1 and 2. It is also observed that the displacement of the cantilever for identical applied Lorentz force is highest, indicated highest sensitivity, for mode 1 and lowest for mode 3. ©EDA Publishing/DTIP 2009. 2009 Conference or Workshop Item NonPeerReviewed application/pdf en http://scholars.utp.edu.my/id/eprint/310/1/paper.pdf Dennis , John Ojur and Talha , W.A. and Hamid , N.H.B. (2009) Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever. In: 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009, 1 April 2009 through 3 April 2009, Rome. http://www.scopus.com/inward/record.url?eid=2-s2.0-70349197961&partnerID=40&md5=99899e06df2bfb210270767d70196294 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Dennis , John Ojur Talha , W.A. Hamid , N.H.B. Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever |
| title | Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
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| title_full | Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
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| title_fullStr | Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
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| title_full_unstemmed | Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
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| title_short | Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
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| title_sort | characterization and modeling of 3-d vibration modes of a micromachined u-shaped cantilever |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://scholars.utp.edu.my/id/eprint/310/ http://scholars.utp.edu.my/id/eprint/310/ http://scholars.utp.edu.my/id/eprint/310/1/paper.pdf |