Structural properties of zinc oxide thin films deposited on various substrates

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Structural properties of zinc oxide thin films deposited on various substrates

In this work, the structural properties of radio frequency sputtering-grown zinc oxide (ZnO) thin films on sapphire (Al2O3), gallium arsenide (GaAs) and n-type silicon (Si) substrates were characterized. Scanning electron microscopy was employed to study the surface morphology of the samples. X-ray...

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Bibliographic Details
Main Authors:	C.G., Ching, P.K., Ooi, S.S., Ng, Hassan, Z., Abu Hassan, H., Abdullah, M.J.
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2014
Online Access:	http://journalarticle.ukm.my/7183/ http://journalarticle.ukm.my/7183/1/16_C.G._Ching.pdf

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