Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering

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Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering

Cupric oxide (CuO) thin films were prepared on a glass and silicon (Si) substrates by radio frequency magnetron sputtering system. The structural, optical and electrical properties of CuO films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), Fourier transform infrared s...

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Bibliographic Details
Main Authors:	P.K., Ooi, C.G., Ching, M.A., Ahmad, S.S., Ng, M.J., Abdullah, H., Abu Hassan, Z., Hassan
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2014
Online Access:	http://journalarticle.ukm.my/7057/ http://journalarticle.ukm.my/7057/1/16_P.K._Ooi.pdf

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