Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application

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Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application

A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective p...

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Bibliographic Details
Main Authors:	Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2014
Online Access:	http://journalarticle.ukm.my/6860/ http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf

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