Sabar D. Hutagalung, Kam, C. L., & Darsono, T. (2014). Nanoscale patterning by AFM lithography and its application on the fabrication of silicon nanowire devices. Universiti Kebangsaan Malaysia.
Chicago Style (17th ed.) CitationSabar D. Hutagalung, Chung Lew Kam, and Teguh Darsono. Nanoscale Patterning by AFM Lithography and Its Application on the Fabrication of Silicon Nanowire Devices. Universiti Kebangsaan Malaysia, 2014.
MLA (9th ed.) CitationSabar D. Hutagalung, et al. Nanoscale Patterning by AFM Lithography and Its Application on the Fabrication of Silicon Nanowire Devices. Universiti Kebangsaan Malaysia, 2014.
Warning: These citations may not always be 100% accurate.