Formation of porous silicon: mechanism of macropores formation in n-type si

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Formation of porous silicon: mechanism of macropores formation in n-type si

We report the formation of macropores in n-Si (100) substrates for different etching times of 20, 40 and 60 min at a constant current density of 25 mA/cm2 under front-side illumination in HF:ethanol (1:4) solution. After etching for 20 min, four-branch-shaped pores of various sizes were observed at...

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Bibliographic Details
Main Authors:	Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2013
Online Access:	http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/1/12_Nurul_Izni.pdf

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