Aluminium-induced crystallization of silicon thin film by excimer laser annealing

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Aluminium-induced crystallization of silicon thin film by excimer laser annealing

Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the cr...

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Bibliographic Details
Main Authors:	Siti Noraiza Ab Razak, Noriah Bidin
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2013
Online Access:	http://journalarticle.ukm.my/5907/ http://journalarticle.ukm.my/5907/1/15%2520Siti%2520Noraiza.pdf

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