Si nanowires produced by very high frequency plasma enhanced chemical vapor deposition via VLS mechanism

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Si nanowires produced by very high frequency plasma enhanced chemical vapor deposition via VLS mechanism

Silicon nanowires (SiNWs) with diameter of about a few nanometers and length of 3 μm on silicon wafers were synthesized by very high frequency plasma enhanced chemical vapor deposition. Scanning electron microscopy (SEM) observations showed that the silicon nanowires were grown randomly and energy-d...

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Bibliographic Details
Main Authors:	Yussof Wahab, Habib Hamidinezhad, Zulkafli Othaman
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2013
Online Access:	http://journalarticle.ukm.my/5901/ http://journalarticle.ukm.my/5901/1/09%2520Yussof%2520Wahab.pdf

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