Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma

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Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma

The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The i...

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Bibliographic Details
Main Authors:	Saboohi, S, Yap, S·L, Chan, L·S, Wong, C·S
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2012
Online Access:	http://journalarticle.ukm.my/5301/ http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf

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