Fabrication of amorphous silicon microgap structure for energy saving devices

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Fabrication of amorphous silicon microgap structure for energy saving devices

We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important appli...

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Bibliographic Details
Main Authors:	Dhahi, T.H.S, Hashim, U, Ali, M.E, Nazwa, T
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2012
Online Access:	http://journalarticle.ukm.my/4863/ http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf

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