Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application

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Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application

In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase...

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Bibliographic Details
Main Authors:	Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/1/16_Nina.pdf

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