Investigating the impact of growth temperature on WS2 thin film

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Investigating the impact of growth temperature on WS2 thin film

Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film cha...

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Bibliographic Details
Main Authors:	Md Khan Sobayel Rafiq, Afida Ayob, Badariah Bais, Md Akhtaruzzaman, Nowshad Amin
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2020
Online Access:	http://journalarticle.ukm.my/17356/ http://journalarticle.ukm.my/17356/1/04.pdf

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