Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

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Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistanc...

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Bibliographic Details
Main Authors:	Nurulhaidah Daud, Nor Farhah Razak, Normahirah Nek Abd Rahman, Azizah Mohd Zahidi, Chin, Siew Xian, Tengku Elmi Azlina Tengku Muda
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2021
Online Access:	http://journalarticle.ukm.my/16509/ http://journalarticle.ukm.my/16509/1/22.pdf

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