Fabrication of micromachined uniform microtrench arrays
for silicon based filtration membrane

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Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane

In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed system is aimed for the biological molecules separation process via filtration in artificial kidney. The system consists of silicon based membrane having arrays of trench with the dimension of approxim...

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Bibliographic Details
Main Authors:	Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2019
Online Access:	http://journalarticle.ukm.my/13708/ http://journalarticle.ukm.my/13708/1/03%20Kamarul%20Asyikin%20Mustafa.pdf

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