Effect of radio frequency power on a-CNx film properties
and its performance as humidity sensors

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Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors

A series of amorphous carbon nitride (a-CNx) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CNx thin films were deposited from a mixture of a fixed flow-rate of ethane (C2H6, 20 sccm) and nit...

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Bibliographic Details
Main Authors:	Rozidawati Awang, Noorain Purhanudin, Nur Sakinah Salman
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2018
Online Access:	http://journalarticle.ukm.my/12668/ http://journalarticle.ukm.my/12668/1/29%20Rozidawati%20Awang.pdf

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