Growth conditions of graphene grown in chemical vapour deposition (CVD)
The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed s...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Penerbit Universiti Kebangsaan Malaysia
2017
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| Online Access: | http://journalarticle.ukm.my/11119/ http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf |
| _version_ | 1848812617918840832 |
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| author | Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, |
| author_facet | Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, |
| author_sort | Mohamad Shukri Sirat, |
| building | UKM Institutional Repository |
| collection | Online Access |
| description | The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene. |
| first_indexed | 2025-11-15T00:05:09Z |
| format | Article |
| id | oai:generic.eprints.org:11119 |
| institution | Universiti Kebangasaan Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T00:05:09Z |
| publishDate | 2017 |
| publisher | Penerbit Universiti Kebangsaan Malaysia |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | oai:generic.eprints.org:111192017-12-21T04:12:01Z http://journalarticle.ukm.my/11119/ Growth conditions of graphene grown in chemical vapour deposition (CVD) Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene. Penerbit Universiti Kebangsaan Malaysia 2017-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf Mohamad Shukri Sirat, and Edhuan Ismail, and Hadi Purwanto, and Mohd Asyadi Azam Mohd Abid, and Mohd Hanafi Ani, (2017) Growth conditions of graphene grown in chemical vapour deposition (CVD). Sains Malaysiana, 46 (7). pp. 1033-1038. ISSN 0126-6039 http://www.ukm.my/jsm/malay_journals/jilid46bil7_2017/KandunganJilid46Bil7_2017.html |
| spellingShingle | Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title | Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title_full | Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title_fullStr | Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title_full_unstemmed | Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title_short | Growth conditions of graphene grown in chemical vapour deposition (CVD) |
| title_sort | growth conditions of graphene grown in chemical vapour deposition (cvd) |
| url | http://journalarticle.ukm.my/11119/ http://journalarticle.ukm.my/11119/ http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf |