Characterization of a-CNx Thin Films prepared by RF-PECVD
Technique for humidity sensor

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Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor

In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6...

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Bibliographic Details
Main Authors:	R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2017
Online Access:	http://journalarticle.ukm.my/10723/ http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf

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