Development of an improved Scott-Russell compliant spatial nano-positioning stage based on work-enrgy method

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Development of an improved Scott-Russell compliant spatial nano-positioning stage based on work-enrgy method

Recently, there are fast advances in certain applications, such as optical alignment systems, stereotaxic instruments in microsurgery and nano-manufacturing, which require three degree-of-freedom spatial positioning stages to perform out-of-horizontal-plane motions. However, the research in this are...

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Bibliographic Details
Main Author:	Taha, Samah Abdelseed
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2019
Subjects:	mechatronics nano-positioning automatic control microelectromechanical system photolithography
Online Access:	https://eprints.nottingham.ac.uk/55982/

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