Lateral scale calibration for focus variation microscopy

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Lateral scale calibration for focus variation microscopy

Areal surface texture measuring instruments can be calibrated by determining a set of metrological characteristics currently in the final stages of standardisation. In this paper, amplification, linearity and perpendicularity characteristics have been determined to calibrate the lateral performance...

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Bibliographic Details
Main Authors:	Alburayt, Anas, Syam, Wahyudin P., Leach, Richard
Format:	Article
Language:	English
Published:	IOP Publishing 2018
Online Access:	https://eprints.nottingham.ac.uk/50626/

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