A simulation method to estimate task-specific uncertainty in 3D microscopy

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A simulation method to estimate task-specific uncertainty in 3D microscopy

Traceability in micro-metrology requires an infrastructure of accredited metrology institutes, effective performance verification procedures, and task specific uncertainty estimation. Focusing on the latter, this paper proposes an approach for the task specific uncertainty estimation based on simula...

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Bibliographic Details
Main Authors:	Moroni, Giovanni, Syam, Wahyudin P., Petrò, Stefano
Format:	Article
Published:	Elsevier 2018
Subjects:	Uncertainty; 3D microscopy; Geometrical metrology; Micrometrology; ISO/TS 15530-4; Focus-variation
Online Access:	https://eprints.nottingham.ac.uk/49477/

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