A simulation method to estimate task-specific uncertainty in 3D microscopy
Traceability in micro-metrology requires an infrastructure of accredited metrology institutes, effective performance verification procedures, and task specific uncertainty estimation. Focusing on the latter, this paper proposes an approach for the task specific uncertainty estimation based on simula...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Elsevier
2018
|
| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/49477/ |
| _version_ | 1848798006083584000 |
|---|---|
| author | Moroni, Giovanni Syam, Wahyudin P. Petrò, Stefano |
| author_facet | Moroni, Giovanni Syam, Wahyudin P. Petrò, Stefano |
| author_sort | Moroni, Giovanni |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | Traceability in micro-metrology requires an infrastructure of accredited metrology institutes, effective performance verification procedures, and task specific uncertainty estimation. Focusing on the latter, this paper proposes an approach for the task specific uncertainty estimation based on simulation for a generic 3D microscope. The proposed simulation approach is based on the identification and a successive parameter estimation of an empirical model of measured points. The model simulates the probing error of the 3D microscope based on a Gaussian process model, thus including the correlation among close points. Parameters for the error simulation are estimated by a deep analysis of error sources of the 3D microscope. Validations of the proposed simulation approach are carried out in the case of focus variation microscopy (FVM), considering several case studies. The procedure proposed in the ISO/TS 15530-4 standard are applied for validation. |
| first_indexed | 2025-11-14T20:12:54Z |
| format | Article |
| id | nottingham-49477 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T20:12:54Z |
| publishDate | 2018 |
| publisher | Elsevier |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-494772020-05-04T19:29:11Z https://eprints.nottingham.ac.uk/49477/ A simulation method to estimate task-specific uncertainty in 3D microscopy Moroni, Giovanni Syam, Wahyudin P. Petrò, Stefano Traceability in micro-metrology requires an infrastructure of accredited metrology institutes, effective performance verification procedures, and task specific uncertainty estimation. Focusing on the latter, this paper proposes an approach for the task specific uncertainty estimation based on simulation for a generic 3D microscope. The proposed simulation approach is based on the identification and a successive parameter estimation of an empirical model of measured points. The model simulates the probing error of the 3D microscope based on a Gaussian process model, thus including the correlation among close points. Parameters for the error simulation are estimated by a deep analysis of error sources of the 3D microscope. Validations of the proposed simulation approach are carried out in the case of focus variation microscopy (FVM), considering several case studies. The procedure proposed in the ISO/TS 15530-4 standard are applied for validation. Elsevier 2018-01-31 Article PeerReviewed Moroni, Giovanni, Syam, Wahyudin P. and Petrò, Stefano (2018) A simulation method to estimate task-specific uncertainty in 3D microscopy. Measurement . ISSN 0263-2241 Uncertainty; 3D microscopy; Geometrical metrology; Micrometrology; ISO/TS 15530-4; Focus-variation https://www.sciencedirect.com/science/article/pii/S0263224118300320 doi:10.1016/j.measurement.2018.01.026 doi:10.1016/j.measurement.2018.01.026 |
| spellingShingle | Uncertainty; 3D microscopy; Geometrical metrology; Micrometrology; ISO/TS 15530-4; Focus-variation Moroni, Giovanni Syam, Wahyudin P. Petrò, Stefano A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title | A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title_full | A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title_fullStr | A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title_full_unstemmed | A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title_short | A simulation method to estimate task-specific uncertainty in 3D microscopy |
| title_sort | simulation method to estimate task-specific uncertainty in 3d microscopy |
| topic | Uncertainty; 3D microscopy; Geometrical metrology; Micrometrology; ISO/TS 15530-4; Focus-variation |
| url | https://eprints.nottingham.ac.uk/49477/ https://eprints.nottingham.ac.uk/49477/ https://eprints.nottingham.ac.uk/49477/ |