An investigation on thermoelastic damping of high-Q ring resonators

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An investigation on thermoelastic damping of high-Q ring resonators

For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoel...

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Bibliographic Details
Main Authors:	Hossain, Syed T., McWilliam, Stewart, Popov, Atanas A.
Format:	Article
Published:	Elsevier 2016
Subjects:	Thermoelastic damping; Ring resonator; Rate gyro; Quality factor; MEMS device
Online Access:	https://eprints.nottingham.ac.uk/46491/

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