Measurement noise of a point autofocus surface topography instrument

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Measurement noise of a point autofocus surface topography instrument

Optical instruments for areal topography measurement can be especially sensitive to noise when scanning is required. Such noise has different sources, including those internally generated and external sources from the environment [1].For some instruments, it is not always possible to evaluate each s...

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Bibliographic Details
Main Authors:	Feng, Xiaobing, Quagliotti, Danilo, Maculotti, Giacomo, Syam, Wahyudin P., Tosello, Guido, Hansen, Hans N., Galetto, Maurizio, Leach, Richard
Format:	Conference or Workshop Item
Published:	2017
Subjects:	areal measurement noise surface texture point autofocus optical microscope
Online Access:	https://eprints.nottingham.ac.uk/44022/

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