Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method

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Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method

In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent eq...

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Bibliographic Details
Main Authors:	Houston, Paul, Sime, Nathan
Format:	Article
Published:	IOP Publishing 2017
Subjects:	MPA-CVD modelling Finite element methods Discontinuous Galerkin methods
Online Access:	https://eprints.nottingham.ac.uk/43461/

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