Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method
In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent eq...
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| Format: | Article |
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IOP Publishing
2017
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| Online Access: | https://eprints.nottingham.ac.uk/43461/ |
| _version_ | 1848796693199323136 |
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| author | Houston, Paul Sime, Nathan |
| author_facet | Houston, Paul Sime, Nathan |
| author_sort | Houston, Paul |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| description | In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent equations for the background gas mass average velocity, gas temperature, electromagnetic field energy and plasma density. The proposed mathematical model is numerically approximated based on exploiting the discontinuous Galerkin finite element method. We demonstrate the practical performance of this computational approach on a variety of CVD reactor geometries for a range of operating conditions. |
| first_indexed | 2025-11-14T19:52:02Z |
| format | Article |
| id | nottingham-43461 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T19:52:02Z |
| publishDate | 2017 |
| publisher | IOP Publishing |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-434612020-05-04T18:53:45Z https://eprints.nottingham.ac.uk/43461/ Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method Houston, Paul Sime, Nathan In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent equations for the background gas mass average velocity, gas temperature, electromagnetic field energy and plasma density. The proposed mathematical model is numerically approximated based on exploiting the discontinuous Galerkin finite element method. We demonstrate the practical performance of this computational approach on a variety of CVD reactor geometries for a range of operating conditions. IOP Publishing 2017-07-03 Article PeerReviewed Houston, Paul and Sime, Nathan (2017) Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method. Journal of Physics D: Applied Physics, 50 (29). 295202/1-295202/16. ISSN 1361-6463 MPA-CVD modelling Finite element methods Discontinuous Galerkin methods http://iopscience.iop.org/article/10.1088/1361-6463/aa77dc/meta; doi:10.1088/1361-6463/aa77dc doi:10.1088/1361-6463/aa77dc |
| spellingShingle | MPA-CVD modelling Finite element methods Discontinuous Galerkin methods Houston, Paul Sime, Nathan Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title | Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title_full | Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title_fullStr | Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title_full_unstemmed | Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title_short | Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method |
| title_sort | numerical modelling of mpa-cvd reactors with the discontinuous galerkin finite element method |
| topic | MPA-CVD modelling Finite element methods Discontinuous Galerkin methods |
| url | https://eprints.nottingham.ac.uk/43461/ https://eprints.nottingham.ac.uk/43461/ https://eprints.nottingham.ac.uk/43461/ |