High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2017
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| Online Access: | https://eprints.nottingham.ac.uk/42301/ |
| _version_ | 1848796456979267584 |
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| author | Su, Rong Ekberg, Peter Leach, Richard K. |
| author_facet | Su, Rong Ekberg, Peter Leach, Richard K. |
| author_sort | Su, Rong |
| building | Nottingham Research Data Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T19:48:17Z |
| format | Conference or Workshop Item |
| id | nottingham-42301 |
| institution | University of Nottingham Malaysia Campus |
| institution_category | Local University |
| last_indexed | 2025-11-14T19:48:17Z |
| publishDate | 2017 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | nottingham-423012020-05-04T18:42:54Z https://eprints.nottingham.ac.uk/42301/ High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface Su, Rong Ekberg, Peter Leach, Richard K. 2017-04-24 Conference or Workshop Item PeerReviewed Su, Rong, Ekberg, Peter and Leach, Richard K. (2017) High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface. In: 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?, 24-25 April 2017, Tuscon, Arizona, USA. |
| spellingShingle | Su, Rong Ekberg, Peter Leach, Richard K. High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title | High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title_full | High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title_fullStr | High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title_full_unstemmed | High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title_short | High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| title_sort | high-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface |
| url | https://eprints.nottingham.ac.uk/42301/ |