Performance verification of a 4-axis focus variation
coordinate measuring system

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Performance verification of a 4-axis focus variation coordinate measuring system

Performance verification of a coordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability as well as measurement traceability to the definition of the meter. State-of-the-art ISO 10360 standard series is the reference text about the procedure of verificati...

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Bibliographic Details
Main Authors:	Moroni, Giovanni, Syam, Wahyudin P., Petrò, Stefano
Format:	Article
Published:	IEEE 2016
Subjects:	Performance Evaluation ISO 10360 standards Coordinate Measuring Systems Focus Variation Microscopy
Online Access:	https://eprints.nottingham.ac.uk/38686/

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