An integrated measurement method for complex micro-scale geometries

Micro-scale geometries are becoming commonplace in many high-precision manufacturing applications. Micro-drilling processes, for example, are being employed for producing holes in demanding applications involving fluid transfer, atomisers and micro-mechanics. This paper explores the measurement and...

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Main Authors: Rabani, Amir, Senin, Nicola, Helmli, Franz, Butler-Smith, Paul, Leach, Richard K.
Format: Conference or Workshop Item
Published: 2016
Subjects:
Online Access:https://eprints.nottingham.ac.uk/33956/
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author Rabani, Amir
Senin, Nicola
Helmli, Franz
Butler-Smith, Paul
Leach, Richard K.
author_facet Rabani, Amir
Senin, Nicola
Helmli, Franz
Butler-Smith, Paul
Leach, Richard K.
author_sort Rabani, Amir
building Nottingham Research Data Repository
collection Online Access
description Micro-scale geometries are becoming commonplace in many high-precision manufacturing applications. Micro-drilling processes, for example, are being employed for producing holes in demanding applications involving fluid transfer, atomisers and micro-mechanics. This paper explores the measurement and characterisation of a high aspect-ratio micro-hole (nominal diameter approximately 1000 pm, aspect-ratio 1:10), produced using abrasive waterjet in Ti6AI4V. X-ray computed tomography, contact micro-coordinate metrology and focus-variation microscopy are used for measuring the hole surfaces, and dedicated computational geometry algorithms are applied to obtain critical hole dimensions, such as radius as a function of depth. The comparison of the measurement and characterisation results obtained by means of the different solutions explored hints at new approaches for multisensor data fusion that can help reduce bias in the measurement of high aspect-ratio micro-scale features.
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format Conference or Workshop Item
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institution University of Nottingham Malaysia Campus
institution_category Local University
last_indexed 2025-11-14T19:21:02Z
publishDate 2016
recordtype eprints
repository_type Digital Repository
spelling nottingham-339562020-05-04T17:49:38Z https://eprints.nottingham.ac.uk/33956/ An integrated measurement method for complex micro-scale geometries Rabani, Amir Senin, Nicola Helmli, Franz Butler-Smith, Paul Leach, Richard K. Micro-scale geometries are becoming commonplace in many high-precision manufacturing applications. Micro-drilling processes, for example, are being employed for producing holes in demanding applications involving fluid transfer, atomisers and micro-mechanics. This paper explores the measurement and characterisation of a high aspect-ratio micro-hole (nominal diameter approximately 1000 pm, aspect-ratio 1:10), produced using abrasive waterjet in Ti6AI4V. X-ray computed tomography, contact micro-coordinate metrology and focus-variation microscopy are used for measuring the hole surfaces, and dedicated computational geometry algorithms are applied to obtain critical hole dimensions, such as radius as a function of depth. The comparison of the measurement and characterisation results obtained by means of the different solutions explored hints at new approaches for multisensor data fusion that can help reduce bias in the measurement of high aspect-ratio micro-scale features. 2016-05-30 Conference or Workshop Item PeerReviewed Rabani, Amir, Senin, Nicola, Helmli, Franz, Butler-Smith, Paul and Leach, Richard K. (2016) An integrated measurement method for complex micro-scale geometries. In: euspen 16th International Conference & Exhibition, 30 May - 3 Jun 2016, Nottingham, UK. High aspect-ratio micro-scale holes; Coordinate metrology; Multi-sensor data fusion http://www.euspen.eu/OurEvents/Nottingham2016.aspx
spellingShingle High aspect-ratio micro-scale holes; Coordinate metrology; Multi-sensor data fusion
Rabani, Amir
Senin, Nicola
Helmli, Franz
Butler-Smith, Paul
Leach, Richard K.
An integrated measurement method for complex micro-scale geometries
title An integrated measurement method for complex micro-scale geometries
title_full An integrated measurement method for complex micro-scale geometries
title_fullStr An integrated measurement method for complex micro-scale geometries
title_full_unstemmed An integrated measurement method for complex micro-scale geometries
title_short An integrated measurement method for complex micro-scale geometries
title_sort integrated measurement method for complex micro-scale geometries
topic High aspect-ratio micro-scale holes; Coordinate metrology; Multi-sensor data fusion
url https://eprints.nottingham.ac.uk/33956/
https://eprints.nottingham.ac.uk/33956/