Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer
In this project, a computer simulation model has been developed to study the effect of annealing on the growth and dissolution of the void and oxide precipitation in Czochralski grown silicon wafer.
| Main Author: | |
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| Format: | Thesis |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/959/ |
| _version_ | 1848789649032478720 |
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| author | Lee, Beng Gee |
| author_facet | Lee, Beng Gee |
| author_sort | Lee, Beng Gee |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | In this project, a computer simulation model has been developed to study the effect of annealing on the growth and dissolution of the void and oxide precipitation in Czochralski grown silicon wafer. |
| first_indexed | 2025-11-14T18:00:04Z |
| format | Thesis |
| id | mmu-959 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:00:04Z |
| publishDate | 2004 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-9592010-07-14T02:31:10Z http://shdl.mmu.edu.my/959/ Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer Lee, Beng Gee QD Chemistry In this project, a computer simulation model has been developed to study the effect of annealing on the growth and dissolution of the void and oxide precipitation in Czochralski grown silicon wafer. 2004 Thesis NonPeerReviewed Lee, Beng Gee (2004) Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer. Masters thesis, Multimedia University. http://myto.perpun.net.my/metoalogin/logina.php |
| spellingShingle | QD Chemistry Lee, Beng Gee Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title | Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title_full | Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title_fullStr | Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title_full_unstemmed | Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title_short | Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer |
| title_sort | computer simulations of void and oxide precipitate in hydrogen-annealed silicon wafer |
| topic | QD Chemistry |
| url | http://shdl.mmu.edu.my/959/ http://shdl.mmu.edu.my/959/ |