Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films
Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the inter...
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| Format: | Thesis |
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2010
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| Online Access: | http://shdl.mmu.edu.my/3411/ |
| _version_ | 1848790320537403392 |
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| author | Lee , Wai Keat |
| author_facet | Lee , Wai Keat |
| author_sort | Lee , Wai Keat |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the interesting chemical, physical, and electrical properties it possessed. |
| first_indexed | 2025-11-14T18:10:45Z |
| format | Thesis |
| id | mmu-3411 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:10:45Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-34112012-03-23T04:16:28Z http://shdl.mmu.edu.my/3411/ Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films Lee , Wai Keat TA Engineering (General). Civil engineering (General) Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the interesting chemical, physical, and electrical properties it possessed. 2010-07 Thesis NonPeerReviewed Lee , Wai Keat (2010) Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films. Masters thesis, University of Multimedia. http://vlib.mmu.edu.my/diglib/login/dlusr/login.php |
| spellingShingle | TA Engineering (General). Civil engineering (General) Lee , Wai Keat Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title | Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_full | Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_fullStr | Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_full_unstemmed | Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_short | Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_sort | pulsed nd:yag laser deposition of ruthenium thin films |
| topic | TA Engineering (General). Civil engineering (General) |
| url | http://shdl.mmu.edu.my/3411/ http://shdl.mmu.edu.my/3411/ |