Automated Lithographic Patterning Via Anodic Oxidation On Silicon Substrate

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Automated Lithographic Patterning Via Anodic Oxidation On Silicon Substrate

AFM is able to form localized oxide structures by applying a negative voltage through the tip, which acts like a \'pen\' to \'draw\' oxide lines on the substrate surface. This provides a simple and low cost technique to create nanoscale oxide patterns. However, the lack of contro...

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Bibliographic Details
Main Author:	Jin, Gan Yeow
Format:	Thesis
Published:	2010
Subjects:	QD Chemistry
Online Access:	http://shdl.mmu.edu.my/3401/

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