Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement

A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed La mange time delay estimation auto-regression (MLTDEAR)-based interpo lator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the perf...

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Main Authors: Sim, K.S., Law, K.K., Tso, C.P.
Format: Article
Published: WILEY-LISS 2007
Subjects:
Online Access:http://shdl.mmu.edu.my/2984/
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author Sim, K.S.
Law, K.K.
Tso, C.P.
author_facet Sim, K.S.
Law, K.K.
Tso, C.P.
author_sort Sim, K.S.
building MMU Institutional Repository
collection Online Access
description A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed La mange time delay estimation auto-regression (MLTDEAR)-based interpo lator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real-time in cases where specimen drift is presented in the SEM image.
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institution Multimedia University
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publishDate 2007
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spelling mmu-29842011-09-29T07:01:52Z http://shdl.mmu.edu.my/2984/ Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement Sim, K.S. Law, K.K. Tso, C.P. T Technology (General) QA75.5-76.95 Electronic computers. Computer science A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed La mange time delay estimation auto-regression (MLTDEAR)-based interpo lator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real-time in cases where specimen drift is presented in the SEM image. WILEY-LISS 2007-11 Article NonPeerReviewed Sim, K.S. and Law, K.K. and Tso, C.P. (2007) Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement. Microscopy Research and Technique, 70 (11). pp. 919-927. ISSN 1059910X http://dx.doi.org/10.1002/jemt.20490 doi:10.1002/jemt.20490 doi:10.1002/jemt.20490
spellingShingle T Technology (General)
QA75.5-76.95 Electronic computers. Computer science
Sim, K.S.
Law, K.K.
Tso, C.P.
Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title_full Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title_fullStr Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title_full_unstemmed Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title_short Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
title_sort mixed lagrange time delay estimation autoregressive wiener filter application for real-time sem image enhancement
topic T Technology (General)
QA75.5-76.95 Electronic computers. Computer science
url http://shdl.mmu.edu.my/2984/
http://shdl.mmu.edu.my/2984/
http://shdl.mmu.edu.my/2984/