The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique

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The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique

In this paper, a novel real-time SNR estimator is proposed. The technique is based on the Autoregressive model and can be embedded onto SEM imaging system for image assessment. The AR based estimator is robust and effective in estimating the noise second order statistics which is required for Wiener...

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Bibliographic Details
Main Authors:	Sim,, KS, Chuah,, HT, Kamel,, NS
Format:	Article
Published:	2005
Subjects:	QA75.5-76.95 Electronic computers. Computer science
Online Access:	http://shdl.mmu.edu.my/2395/

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