The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique

In this paper, a novel real-time SNR estimator is proposed. The technique is based on the Autoregressive model and can be embedded onto SEM imaging system for image assessment. The AR based estimator is robust and effective in estimating the noise second order statistics which is required for Wiener...

Full description

Bibliographic Details
Main Authors: Sim,, KS, Chuah,, HT, Kamel,, NS
Format: Article
Published: 2005
Subjects:
Online Access:http://shdl.mmu.edu.my/2395/
_version_ 1848790044143255552
author Sim,, KS
Chuah,, HT
Kamel,, NS
author_facet Sim,, KS
Chuah,, HT
Kamel,, NS
author_sort Sim,, KS
building MMU Institutional Repository
collection Online Access
description In this paper, a novel real-time SNR estimator is proposed. The technique is based on the Autoregressive model and can be embedded onto SEM imaging system for image assessment. The AR based estimator is robust and effective in estimating the noise second order statistics which is required for Wiener filtering process. The AR wiener filter is then embedded onto the frame grabber card to do real-time SEM noise removal. The AR-based method is compared with the Simple method-wiener filter as well as First-order interpolation-wiener filter. In the most testing cases, the AR-wiener filter outperforms the rest of the systems.
first_indexed 2025-11-14T18:06:21Z
format Article
id mmu-2395
institution Multimedia University
institution_category Local University
last_indexed 2025-11-14T18:06:21Z
publishDate 2005
recordtype eprints
repository_type Digital Repository
spelling mmu-23952011-08-22T03:11:17Z http://shdl.mmu.edu.my/2395/ The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique Sim,, KS Chuah,, HT Kamel,, NS QA75.5-76.95 Electronic computers. Computer science In this paper, a novel real-time SNR estimator is proposed. The technique is based on the Autoregressive model and can be embedded onto SEM imaging system for image assessment. The AR based estimator is robust and effective in estimating the noise second order statistics which is required for Wiener filtering process. The AR wiener filter is then embedded onto the frame grabber card to do real-time SEM noise removal. The AR-based method is compared with the Simple method-wiener filter as well as First-order interpolation-wiener filter. In the most testing cases, the AR-wiener filter outperforms the rest of the systems. 2005 Article NonPeerReviewed Sim,, KS and Chuah,, HT and Kamel,, NS (2005) The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique. Vision '05: Proceedings of the 2005 International Conference on Computer Vision . pp. 219-225.
spellingShingle QA75.5-76.95 Electronic computers. Computer science
Sim,, KS
Chuah,, HT
Kamel,, NS
The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title_full The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title_fullStr The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title_full_unstemmed The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title_short The Scanning Electron Microscope (SEM) assessment system using the autoregressive (AR) technique
title_sort scanning electron microscope (sem) assessment system using the autoregressive (ar) technique
topic QA75.5-76.95 Electronic computers. Computer science
url http://shdl.mmu.edu.my/2395/