Characterization Of SEM Charging Effects

The research has demonstrated the potential for charging effect identification. Then the dynamic range compensation technique helps to further improve the charging image quality. This achievement is definitely useful for SEM applications.

Bibliographic Details
Main Author:	Tan, Yik Yee
Format:	Thesis
Published:	2007
Subjects:	QH Natural history
Online Access:	http://shdl.mmu.edu.my/1542/

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