Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers
The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd...
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| Format: | Thesis |
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2006
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| Online Access: | http://shdl.mmu.edu.my/1089/ |
| _version_ | 1848789689352323072 |
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| author | Kang, Ban Hong |
| author_facet | Kang, Ban Hong |
| author_sort | Kang, Ban Hong |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd, which was located in the free trade zone, Ulu Klang, Selangor. |
| first_indexed | 2025-11-14T18:00:43Z |
| format | Thesis |
| id | mmu-1089 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:00:43Z |
| publishDate | 2006 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-10892010-08-05T03:42:51Z http://shdl.mmu.edu.my/1089/ Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers Kang, Ban Hong QC Physics The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd, which was located in the free trade zone, Ulu Klang, Selangor. 2006-07 Thesis NonPeerReviewed Kang, Ban Hong (2006) Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers. Masters thesis, Multimedia University. http://myto.perpun.net.my/metoalogin/logina.php |
| spellingShingle | QC Physics Kang, Ban Hong Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title | Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_full | Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_fullStr | Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_full_unstemmed | Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_short | Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_sort | surface photo voltage measurement of ultra-violet irradiation effects in oxidized silicon wafers |
| topic | QC Physics |
| url | http://shdl.mmu.edu.my/1089/ http://shdl.mmu.edu.my/1089/ |