Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit...
| Main Authors: | , , |
|---|---|
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2011
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/9825/ http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf |
| _version_ | 1848777163133681664 |
|---|---|
| author | Ma, Li Ya Nordin, Anis Nurashikin Khan, Sheroz |
| author_facet | Ma, Li Ya Nordin, Anis Nurashikin Khan, Sheroz |
| author_sort | Ma, Li Ya |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper presents the design and analysis of an
integrated oversampling converter with MEMS capacitive
sensor. The MEMS capacitive sensor is a comb-drive which
provides change in capacitance when change in acceleration is
detected. The analog-to-digital converter (ADC) is a first-order
1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for
MEMS sensors since their output voltage are in mV and are low
frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor
were designed in Silterra’s 0.13μm CMOS process. Simulation
of the Σ-Δ ADC was conducted using CadenceTM Spectre, while
the MEMS sensor was simulated by COMSOL Multiphysics®.
Results indicate that the Σ-Δ ADC can process small voltage
output of the MEMS sensor and convert it into digital signals
satisfactorily. |
| first_indexed | 2025-11-14T14:41:37Z |
| format | Proceeding Paper |
| id | iium-9825 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:41:37Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-98252012-01-12T08:41:47Z http://irep.iium.edu.my/9825/ Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor Ma, Li Ya Nordin, Anis Nurashikin Khan, Sheroz TK7885 Computer engineering This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for MEMS sensors since their output voltage are in mV and are low frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor were designed in Silterra’s 0.13μm CMOS process. Simulation of the Σ-Δ ADC was conducted using CadenceTM Spectre, while the MEMS sensor was simulated by COMSOL Multiphysics®. Results indicate that the Σ-Δ ADC can process small voltage output of the MEMS sensor and convert it into digital signals satisfactorily. 2011-05-11 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf Ma, Li Ya and Nordin, Anis Nurashikin and Khan, Sheroz (2011) Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor. In: 2011 IEEE Symposium Design, Test and Packaging of MEMS and MOEMS, 11-13 May 2011, Aix-en-Provence, France. http://cmp.imag.fr/conferences/dtip/dtip2011/ |
| spellingShingle | TK7885 Computer engineering Ma, Li Ya Nordin, Anis Nurashikin Khan, Sheroz Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title | Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title_full | Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title_fullStr | Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title_full_unstemmed | Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title_short | Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor |
| title_sort | design and simulation of an on-chip oversampling converter with a cmos-mems differential capacitive sensor |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/9825/ http://irep.iium.edu.my/9825/ http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf |