Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics
Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. In this report, a low temperature operation of an atomic force microscope (AFM) was used to condense ambient humidity to perform a thin frozen wat...
| Main Authors: | , , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/9447/ http://irep.iium.edu.my/9447/1/AGUS_-_Proc_ICEEI-2007.pdf |
| _version_ | 1848777127117193216 |
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| author | Sutjipto, Agus Geter Edy -, Afzeri Muhida, Riza Mridha, Shahjahan |
| author_facet | Sutjipto, Agus Geter Edy -, Afzeri Muhida, Riza Mridha, Shahjahan |
| author_sort | Sutjipto, Agus Geter Edy |
| building | IIUM Repository |
| collection | Online Access |
| description | Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. In this report, a low temperature operation of an atomic force microscope (AFM) was used to condense ambient humidity to perform a thin frozen water layer covering a silicon wafer surface. A scanning probe was contacted with the layer and a zero bias voltage was applied to the probe tip. The frozen water film acted both as an electrolyte for forming the oxides and as a resource of hydroxide. Using this technique, a consistency in height of about 6 nm silicon dioxide patterns layer
could be achieved. |
| first_indexed | 2025-11-14T14:41:02Z |
| format | Proceeding Paper |
| id | iium-9447 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:41:02Z |
| publishDate | 2007 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-94472012-04-06T07:22:47Z http://irep.iium.edu.my/9447/ Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics Sutjipto, Agus Geter Edy -, Afzeri Muhida, Riza Mridha, Shahjahan TK452 Electric apparatus and materials. Electric circuits. Electric networks Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. In this report, a low temperature operation of an atomic force microscope (AFM) was used to condense ambient humidity to perform a thin frozen water layer covering a silicon wafer surface. A scanning probe was contacted with the layer and a zero bias voltage was applied to the probe tip. The frozen water film acted both as an electrolyte for forming the oxides and as a resource of hydroxide. Using this technique, a consistency in height of about 6 nm silicon dioxide patterns layer could be achieved. 2007-06-17 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/9447/1/AGUS_-_Proc_ICEEI-2007.pdf Sutjipto, Agus Geter Edy and -, Afzeri and Muhida, Riza and Mridha, Shahjahan (2007) Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics. In: International Conference on Electrical Engineering and Informatics Institut Teknologi , 17-19 June 2007, Bandung, Indonesia . |
| spellingShingle | TK452 Electric apparatus and materials. Electric circuits. Electric networks Sutjipto, Agus Geter Edy -, Afzeri Muhida, Riza Mridha, Shahjahan Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title | Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title_full | Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title_fullStr | Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title_full_unstemmed | Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title_short | Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics |
| title_sort | novel nanofabrication process of oxide patterns using afm in low operating temperature: a promising lithographic tool for future molecular electronics |
| topic | TK452 Electric apparatus and materials. Electric circuits. Electric networks |
| url | http://irep.iium.edu.my/9447/ http://irep.iium.edu.my/9447/1/AGUS_-_Proc_ICEEI-2007.pdf |