Recent nanofabrication of silicon dioxide on silicon wafer using AFM operated at low temperature

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Recent nanofabrication of silicon dioxide on silicon wafer using AFM operated at low temperature

Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. This report initiated the idea of the possibility of a controlled nanofabrication of SiO2 on silicon wafer by utilizing a frozen humid air film. A...

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Bibliographic Details
Main Authors:	Sutjipto, Agus Geter Edy, , Afzeri, Shafie, Amir Akramin
Format:	Article
Language:	English
Published:	Trans Tech Publications Ltd., Switzerland 2011
Subjects:	TA401 Materials of engineering and construction
Online Access:	http://irep.iium.edu.my/8577/ http://irep.iium.edu.my/8577/1/AGUS_-_Applied_Mechanics_and_Materials_2011_-_Nanofabrication.pdf

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