Design and simulation of film bulk acoustic wave resonator (FBAR) gas sensor based on ZnO thin film

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Design and simulation of film bulk acoustic wave resonator (FBAR) gas sensor based on ZnO thin film

The interest in miniature device has led to the development of thin film bulk acoustic wave resonator (FBAR). The function of a resonator to gain a high resonant frequency value of an equipment make FBAR is suitable to act as sensor and filter for wide range of applications. The success of FBAR in p...

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Bibliographic Details
Main Authors:	Zarifsofia, Sabani, Aliza Aini, Md Ralib, Karim, Jamilah, Saidin, Norazlina, Mohamad Razali, Nur Fatin
Format:	Proceeding Paper
Language:	English English
Published:	Institute of Electrical and Electronics Engineers Inc. 2019
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/78998/ http://irep.iium.edu.my/78998/1/78998_Design%20and%20simulation%20of%20Film%20Bulk%20_complete%20conf.%20article.pdf http://irep.iium.edu.my/78998/2/78998_Design%20and%20simulation%20of%20Film%20Bulk%20_scopus.pdf

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