An experimental study on precision grinding of silicon using diamond grinding pins

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An experimental study on precision grinding of silicon using diamond grinding pins

Silicon substrates are difficult to grind to good surface finishes using conventional machining. Ductile mode machining is often required to have flawless machining but this requires the use of expensive machine tools. However, precision grinding using conventional machine tools could generate large...

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Bibliographic Details
Main Authors:	Alao, Abdur-Rasheed, Konneh, Mohamed
Format:	Article
Language:	English
Published:	Inderscience Enterprises Ltd. 2011
Subjects:	TJ1125 Machine shops and machine shop practice
Online Access:	http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/1/IJMatEI0203-0410_ALAO.pdf

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