Towards achieving nanofinish on silicon (Si) wafer by μ-wire
electro-discharge machining

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Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining

This study investigates the use of nanopowder-mixed dielectric oil and temporary metallic coating on highly doped Si sample to achieve nanometric surface roughness using μ-WEDM operation. To achieve this, two different nanopowders were used in dielectric medium with two different temporary metallic...

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Bibliographic Details
Main Authors:	Jarin, Sams, Saleh, Tanveer, Muthalif, Asan G. A., Ali, Mohammad Yeakub, Bhuiyan, Moinul
Format:	Article
Language:	English English English
Published:	Springer Verlag 2018
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/66411/ http://irep.iium.edu.my/66411/18/66411_Towards%20achieving%20nanofinish%20on%20silicon_complete.pdf http://irep.iium.edu.my/66411/7/66411_Towards%20achieving%20nanofinish%20on%20silicon%20SCOPUS.pdf http://irep.iium.edu.my/66411/12/66411%20Towards%20achieving%20nanofinish%20on%20silicon%20WOS.pdf

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