Acoustic wave based MEMS devices, development and application

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Acoustic wave based MEMS devices, development and application

Acoustic waves based MEMS devices offer a promising technology platform for a wide range of applications due to their high sensitivity and the capability to operate wirelessly. These devices utilize acoustic waves propagating through or on the surface of a piezoelectric material. An acoustic wave de...

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Bibliographic Details
Main Authors:	Voiculescu, Ioana, Nordin, Anis Nurashikin
Format:	Book Chapter
Language:	English
Published:	InTech 2012
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/6400/ http://irep.iium.edu.my/6400/1/Acoustic-wave-based-mems-devices--development-and-applications.pdf

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